SiGe epitaxial growth and its atomic-layer control

研究成果: Article › 査読

本文言語	English
ページ（範囲）	8-12
ページ数	5
ジャーナル	Shinku/Journal of the Vacuum Society of Japan
巻	48
号	1
DOI	https://doi.org/10.3131/jvsj.48.8
出版ステータス	Published - 2005

ASJC Scopus subject areas

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