TY - JOUR
T1 - Signal propagation characteristics in polyimide optical wave-guide with micro-mirrors for optical multichip module
AU - Kuwana, Yasuhiro
AU - Hirose, Akinori
AU - Kurino, Hiroyuki
AU - Koyanagi, Mitsumasa
PY - 1999
Y1 - 1999
N2 - In order to develop key technologies for a multichip module with optical interconnection, a test module using polyimide optical waveguides (POWs) with micro-mirrors and a photodiode array was successfully fabricated. Through the fabrication of this test module, we developed such basic technologies as POW formation, vertical optical coupling with micro-mirrors buried in POWs, chip bonding with copper bumps, and so on. The signal propagation in POWs was characterized by the detection of vertical output signals at micro-mirrors. From these characteristics, the transmission loss caused by passing a mirror was evaluated to be 0.16 dB.
AB - In order to develop key technologies for a multichip module with optical interconnection, a test module using polyimide optical waveguides (POWs) with micro-mirrors and a photodiode array was successfully fabricated. Through the fabrication of this test module, we developed such basic technologies as POW formation, vertical optical coupling with micro-mirrors buried in POWs, chip bonding with copper bumps, and so on. The signal propagation in POWs was characterized by the detection of vertical output signals at micro-mirrors. From these characteristics, the transmission loss caused by passing a mirror was evaluated to be 0.16 dB.
KW - MCM
KW - Micro-mirror
KW - Multi-fan-out
KW - Parallel processor
KW - Polyimide optical waveguide
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U2 - 10.1143/JJAP.38.2660
DO - 10.1143/JJAP.38.2660
M3 - Article
AN - SCOPUS:0347579308
SN - 0021-4922
VL - 38
SP - 2660
EP - 2663
JO - Japanese Journal of Applied Physics, Part 1: Regular Papers & Short Notes
JF - Japanese Journal of Applied Physics, Part 1: Regular Papers & Short Notes
IS - 4 B
ER -