Silicon-based micro calorimeter with single thermocouple structure for thermal characterization

Zhuqing Wang, Mitsuteru Kimura, Masaya Toda, Takahito Ono

研究成果: ジャーナルへの寄稿学術論文査読

3 被引用数 (Scopus)

抄録

We proposed a silicon-based micro calorimeter with a single thermocouple structure for heat detection. Silicon as a material with high Seebeck coefficient is employed to achieve prominent sensitivity using a single thermocouple junction. The suspended bridge structure composed of the device layer of silicon on insulator (SOI), which is one important thermocouple materials, is also fabricated for micro calorimeter by the microelectromechanical system (MEMS) technology to obtain reduced heat loss and achieve high sensitivity and fast response. The fabricated micro calorimeter shows a sensitivity of 0.44 V/W and response time less than 20 ms. The single thermocouple structure allows facile fabrication process and compact structure for portable thermal detection sensor. This proposed silicon-based thermocouple calorimeter with a bridge structure is capable of integrating a silicon sensor into the micro fluidic system for applications in health detection.

本文言語英語
論文番号8720221
ページ(範囲)1198-1200
ページ数3
ジャーナルIEEE Electron Device Letters
40
7
DOI
出版ステータス出版済み - 2019 7月

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