Silicon-based micro calorimeter with single thermocouple structure for thermal characterization

Engineering

• Calorimeter 100%
• Detection 30%
• Bridge Structure 20%
• Fabrication 10%
• Response Time 10%
• Heat Losses 10%
• Seebeck Coefficient 10%
• Fast Response 10%
• System Technology 10%
• Silicon on Insulator 10%
• Thermocouple Material 10%
• Thermal Characterization 10%
• Silicon Sensor 10%
• Applications 10%
• Obtains 10%
• High Sensitivity 10%
• Sensor 10%

Physics

• Silicon 40%
• Detection 30%
• Fluidics 20%
• Microelectromechanical System 10%
• Seebeck Effect 10%
• Fabrication 10%
• Utilization 10%
• Heat 10%