Simultaneous molding and low-temperature bonding of Au microstructures for fabrication of micromirrors on non-silicon substrates

Seiya Matsuoka; Eiji Higurashi; Tadatomo Suga; Renshi Sawada

doi:10.1109/OMN.2016.7565926

Simultaneous molding and low-temperature bonding of Au microstructures for fabrication of micromirrors on non-silicon substrates

Seiya Matsuoka, Eiji Higurashi, Tadatomo Suga, Renshi Sawada

研究成果: Conference contribution

抄録

In order to realize micromirrors on non-silicon substrates, low-temperature bonding method of Au microrods (diameter: 100-130 μm) using glass molds is presented. First, a target substrate with an Au thin film and the Au microrod were surface activated using hydrogen plasma. Then, the Au microrod was pressed against the target substrate using the glass mold at 150 °C in ambient air. The Au microrod was plastically deformed and smooth surface (11 nm rms) was successfully fabricated on the Au microrod. Using the glass as the mold material, molding and Au-Au bonding were performed in one processing step.

本文言語	English
ホスト出版物のタイトル	2016 International Conference on Optical MEMS and Nanophotonics, OMN 2016 - Proceedings
出版社	IEEE Computer Society
ISBN（電子版）	9781509010356
DOI	https://doi.org/10.1109/OMN.2016.7565926
出版ステータス	Published - 2016 9月 13
外部発表	はい
イベント	21st International Conference on Optical MEMS and Nanophotonics, OMN 2016 - Singapore, Singapore 継続期間: 2016 7月 31 → 2016 8月 4

出版物シリーズ

名前	International Conference on Optical MEMS and Nanophotonics
巻	2016-September
ISSN（印刷版）	2160-5033
ISSN（電子版）	2160-5041

Other

Other	21st International Conference on Optical MEMS and Nanophotonics, OMN 2016
国/地域	Singapore
City	Singapore
Period	16/7/31 → 16/8/4

ASJC Scopus subject areas

ハードウェアとアーキテクチャ
電子工学および電気工学
電子材料、光学材料、および磁性材料

文献へのアクセス

10.1109/OMN.2016.7565926

他のファイルとリンク

フィンガープリント

「Simultaneous molding and low-temperature bonding of Au microstructures for fabrication of micromirrors on non-silicon substrates」の研究トピックを掘り下げます。これらがまとまってユニークなフィンガープリントを構成します。

引用スタイル

Matsuoka, S., Higurashi, E., Suga, T., & Sawada, R. (2016). Simultaneous molding and low-temperature bonding of Au microstructures for fabrication of micromirrors on non-silicon substrates. In 2016 International Conference on Optical MEMS and Nanophotonics, OMN 2016 - Proceedings [7565926] (International Conference on Optical MEMS and Nanophotonics; Vol. 2016-September). IEEE Computer Society. https://doi.org/10.1109/OMN.2016.7565926

Simultaneous molding and low-temperature bonding of Au microstructures for fabrication of micromirrors on non-silicon substrates. / Matsuoka, Seiya; Higurashi, Eiji; Suga, Tadatomo その他.
2016 International Conference on Optical MEMS and Nanophotonics, OMN 2016 - Proceedings. IEEE Computer Society, 2016. 7565926 (International Conference on Optical MEMS and Nanophotonics; Vol. 2016-September).

研究成果: Conference contribution

Matsuoka, S, Higurashi, E, Suga, T & Sawada, R 2016, Simultaneous molding and low-temperature bonding of Au microstructures for fabrication of micromirrors on non-silicon substrates. in 2016 International Conference on Optical MEMS and Nanophotonics, OMN 2016 - Proceedings., 7565926, International Conference on Optical MEMS and Nanophotonics, vol. 2016-September, IEEE Computer Society, 21st International Conference on Optical MEMS and Nanophotonics, OMN 2016, Singapore, Singapore, 16/7/31. https://doi.org/10.1109/OMN.2016.7565926

Matsuoka S, Higurashi E, Suga T, Sawada R. Simultaneous molding and low-temperature bonding of Au microstructures for fabrication of micromirrors on non-silicon substrates. In 2016 International Conference on Optical MEMS and Nanophotonics, OMN 2016 - Proceedings. IEEE Computer Society. 2016. 7565926. (International Conference on Optical MEMS and Nanophotonics). doi: 10.1109/OMN.2016.7565926

Matsuoka, Seiya ; Higurashi, Eiji ; Suga, Tadatomo その他. / Simultaneous molding and low-temperature bonding of Au microstructures for fabrication of micromirrors on non-silicon substrates. 2016 International Conference on Optical MEMS and Nanophotonics, OMN 2016 - Proceedings. IEEE Computer Society, 2016. (International Conference on Optical MEMS and Nanophotonics).

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