TY - JOUR
T1 - Soft Magnetic Properties and Microstructure of Co-Ta-N Films
AU - Shimatsu, T.
AU - Kimura, W.
AU - Satoh, K.
AU - Shoji, H.
AU - Takahashi, M.
AU - Wakiyama, T.
PY - 1993/12
Y1 - 1993/12
N2 - Co-(0 to 15 at%)Ta-N sputtered films were studied in order to clarify the correlation between the structure, induced magnetic anisotropy, local anisotropy fluctuation, and soft magnetic properties. The results for electrical resistivity and film magnetostriction indicate that the temperature Txl at which Co crystallites are formed from an amorphous structure is lower than the temperature at which crystallites of Ta-nitrides are formed. The difference was 150°C for Co-15 at% Ta-N films. A large uniaxial magnetic anisotropy was induced at Txl by annealing in a magnetic field, and even after crystallization, a uniaxial anisotropy of magnitude 2xl03 erg/cc could be reversibly induced by annealing in a magnetic field.
AB - Co-(0 to 15 at%)Ta-N sputtered films were studied in order to clarify the correlation between the structure, induced magnetic anisotropy, local anisotropy fluctuation, and soft magnetic properties. The results for electrical resistivity and film magnetostriction indicate that the temperature Txl at which Co crystallites are formed from an amorphous structure is lower than the temperature at which crystallites of Ta-nitrides are formed. The difference was 150°C for Co-15 at% Ta-N films. A large uniaxial magnetic anisotropy was induced at Txl by annealing in a magnetic field, and even after crystallization, a uniaxial anisotropy of magnitude 2xl03 erg/cc could be reversibly induced by annealing in a magnetic field.
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U2 - 10.1109/TJMJ.1993.4565774
DO - 10.1109/TJMJ.1993.4565774
M3 - Article
AN - SCOPUS:0027755727
SN - 0882-4959
VL - 8
SP - 927
EP - 933
JO - IEEE translation journal on magnetics in Japan
JF - IEEE translation journal on magnetics in Japan
IS - 12
ER -