Spherical silicon micromirrors bent by anodic bonding

Tong Wu, Takahiro Yamasaki, Ryohei Hokari, Kazuhiro Hane

研究成果: ジャーナルへの寄稿学術論文査読

5 被引用数 (Scopus)

抄録

We propose here a novel and stable method for fabricating spherical micromirror by bonding a flat freestanding single-crystal-silicon (SCS) membrane with a fulcrum on a glass substrate. Smooth convex spherical surface is achieved inside the fulcrum by the bending moment generated in the circumference of the SCS membrane. The surface profiles fit well with parabolic curves within 36nm RMS error indicating a good optical performance. By modifying the diameter of the fulcrum, we also demonstrate that it is possible to fabricate micromirrors with a wide range of focal length (0.4mm-1.6mm). The fabricated micromirrors are also used as the mold for replication of micro polymeric lenses. The surface profiles of the micromirrors are transferred to the polymeric replica with a high accuracy.

本文言語英語
ページ(範囲)11897-11905
ページ数9
ジャーナルOptics Express
19
12
DOI
出版ステータス出版済み - 2011 6月 6

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