TY - JOUR
T1 - Subwavelength antireflection gratings for light emitting diodes and photodiodes fabricated by fast atom beam etching
AU - Ishimori, Masahiro
AU - Kanamori, Yoshiaki
AU - Sasaki, Minoru
AU - Hane, Kazuhiro
PY - 2002/6
Y1 - 2002/6
N2 - A two-dimensional antireflection subwavelength-structured (SWS) surface is fabricated on GaAlAs light-emitting diodes (LEDs) and photodiodes. The SWS is patterned by electron beam lithography and etched by fast atom beams of SF6 and Cl2 gases. The SWS grating has a conical profile, 200 nm period and 270 nm groove depth. The emission intensity from this LED is 30% larger than that from the LED without a SWS grating at the peak emission wavelength. When this device is used as a photodiode, the reflection reduced by the SWS surface increases both the short-circuit current and open-circuit voltage. The SWS surface is useful as an antireflection structure improving the efficiency of the light emission of LEDs and the light detection of photodiodes.
AB - A two-dimensional antireflection subwavelength-structured (SWS) surface is fabricated on GaAlAs light-emitting diodes (LEDs) and photodiodes. The SWS is patterned by electron beam lithography and etched by fast atom beams of SF6 and Cl2 gases. The SWS grating has a conical profile, 200 nm period and 270 nm groove depth. The emission intensity from this LED is 30% larger than that from the LED without a SWS grating at the peak emission wavelength. When this device is used as a photodiode, the reflection reduced by the SWS surface increases both the short-circuit current and open-circuit voltage. The SWS surface is useful as an antireflection structure improving the efficiency of the light emission of LEDs and the light detection of photodiodes.
KW - Antireflection
KW - Fast atom beam
KW - Light-emitting diode
KW - Photodiode
KW - Subwavelength grating
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U2 - 10.1143/jjap.41.4346
DO - 10.1143/jjap.41.4346
M3 - Article
AN - SCOPUS:0036614001
SN - 0021-4922
VL - 41
SP - 4346
EP - 4349
JO - Japanese Journal of Applied Physics, Part 1: Regular Papers & Short Notes
JF - Japanese Journal of Applied Physics, Part 1: Regular Papers & Short Notes
IS - 6 B
ER -