Suppression of anomalous threshold voltage increase with area scaling for Mg- or La-incorporated high-k/metal gate nMISFETs in deeply scaled region
T. Morooka, M. Sato, T. Matsuki, T. Suzuki, K. Shiraishi, A. Uedono, S. Miyazaki, K. Ohmori, K. Yamada, T. Nabatame, T. Chikyow, J. Yugami, K. Ikeda, Y. Ohji
研究成果: Conference contribution
8
被引用数
(Scopus)