Technology for MEMS commercialization: Current status and future prospects

Renshi Sawada; Eiji Higurashi

doi:10.2493/jjspe.76.491

Technology for MEMS commercialization: Current status and future prospects

研究成果: Review article › 査読

本文言語	English
ページ（範囲）	491-497
ページ数	7
ジャーナル	Seimitsu Kogaku Kaishi/Journal of the Japan Society for Precision Engineering
巻	76
号	5
DOI	https://doi.org/10.2493/jjspe.76.491
出版ステータス	Published - 2010 5月
外部発表	はい

ASJC Scopus subject areas

機械工学

文献へのアクセス

10.2493/jjspe.76.491

他のファイルとリンク

引用スタイル

@article{100d6181ee104d10810569f7b3eae704,

title = "Technology for MEMS commercialization: Current status and future prospects",

keywords = "Commercialization, Design, Mems, Micro-mirrors, Micro-sensors, Micromachining, Products",

author = "Renshi Sawada and Eiji Higurashi",

year = "2010",

month = may,

doi = "10.2493/jjspe.76.491",

language = "English",

volume = "76",

pages = "491--497",

journal = "Seimitsu Kogaku Kaishi/Journal of the Japan Society for Precision Engineering",

issn = "0912-0289",

publisher = "Japan Society for Precision Engineering",

number = "5",

}

TY - JOUR

T1 - Technology for MEMS commercialization

T2 - Current status and future prospects

AU - Sawada, Renshi

AU - Higurashi, Eiji

PY - 2010/5

Y1 - 2010/5

KW - Commercialization

KW - Design

KW - Mems

KW - Micro-mirrors

KW - Micro-sensors

KW - Micromachining

KW - Products

UR - http://www.scopus.com/inward/record.url?scp=77955457245&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=77955457245&partnerID=8YFLogxK

U2 - 10.2493/jjspe.76.491

DO - 10.2493/jjspe.76.491

M3 - Review article

AN - SCOPUS:77955457245

SN - 0912-0289

VL - 76

SP - 491

EP - 497

JO - Seimitsu Kogaku Kaishi/Journal of the Japan Society for Precision Engineering

JF - Seimitsu Kogaku Kaishi/Journal of the Japan Society for Precision Engineering

IS - 5

ER -