@inproceedings{81614c29f01b4eb99b80cf6c2cc0bf30,
title = "TEM analysis on nanovoid formation in annealed amorphous oxides",
abstract = "Formation behavior of nanovoids during the annealing of amorphous Al 2O3 and WO3 was studied by transmission electron microscopy. The density and size of the voids in Al2O 3 and WO3 increase with increasing annealing temperature from 973 to 1123 K and from 573 to 673 K, respectively. It is suggested that the formation of nanovoids during annealing is attributed to the large difference in density between as-deposited amorphous and crystalline oxides.",
keywords = "Amorphous oxides, Crystallization, Nanoporous",
author = "Ryusuke Nakamura and Takehiro Shudo and Akihiko Hirata and Manabu Ishimaru and Hideo Nakajima",
year = "2011",
doi = "10.4028/www.scientific.net/MSF.695.541",
language = "English",
isbn = "9783037852224",
series = "Materials Science Forum",
publisher = "Trans Tech Publications Ltd",
pages = "541--544",
booktitle = "Eco-Materials Processing and Design XII",
}