抄録
Two kinds of electrostatic servo capacitive vacuum sensors have been successfully fabricated using P+ + silicon etch-stop and vacuum anodic-bonding techniques. In order to maintain the reference cavity at high vacuum, a non-evaporable getter (NEG) is used as a small vacuum pump. The dynamic range of the sensor can be extended by a servo system. The pressure responses of the sensors are good. The plot of servo voltage versus pressure is measured and the theoretical data agree with the experimental results.
| 本文言語 | English |
|---|---|
| ページ（範囲） | 213-217 |
| ページ数 | 5 |
| ジャーナル | Sensors and Actuators, A: Physical |
| 巻 | 66 |
| 号 | 1-3 |
| DOI | |
| 出版ステータス | Published - 1998 4月 1 |
ASJC Scopus subject areas
- 電子材料、光学材料、および磁性材料
- 器械工学
- 凝縮系物理学
- 表面、皮膜および薄膜
- 金属および合金
- 電子工学および電気工学