TY - JOUR
T1 - Thermal plasmas for nanofabrication
AU - Shigeta, Masaya
AU - Murphy, Anthony B.
PY - 2011/5/4
Y1 - 2011/5/4
N2 - In this paper, we review the recent progress in nanofabrication by thermal plasmas, and attempt to define some of the most important issues in the field. For synthesis of nanoparticles, the experimental studies in the past five years are briefly introduced; the theoretical and numerical modelling works of the past 20 years are reviewed with some detailed explanations. Also, the use of thermal plasmas to produce nanostructured films and coatings is described. A wide range of technologies have been developed, ranging from chemical vapour deposition processes to new plasma spraying processes. We present an overview of the different techniques and the important physical phenomena, as well as the requirements for future progress.
AB - In this paper, we review the recent progress in nanofabrication by thermal plasmas, and attempt to define some of the most important issues in the field. For synthesis of nanoparticles, the experimental studies in the past five years are briefly introduced; the theoretical and numerical modelling works of the past 20 years are reviewed with some detailed explanations. Also, the use of thermal plasmas to produce nanostructured films and coatings is described. A wide range of technologies have been developed, ranging from chemical vapour deposition processes to new plasma spraying processes. We present an overview of the different techniques and the important physical phenomena, as well as the requirements for future progress.
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U2 - 10.1088/0022-3727/44/17/174025
DO - 10.1088/0022-3727/44/17/174025
M3 - Article
AN - SCOPUS:79954624504
SN - 0022-3727
VL - 44
JO - Journal Physics D: Applied Physics
JF - Journal Physics D: Applied Physics
IS - 17
M1 - 174025
ER -