Thermal stability evaluation of diamond-like nanocomposite coatings

Won Jae Yang, Yong Ho Choa, Tohru Sekino, Kwang Bo Shim, Koichi Niihara, Keun Ho Auh

研究成果: Article査読

76 被引用数 (Scopus)


Diamond-like nanocomposite (DLN) is a class of modified diamond-like carbon (DLC) coatings. The DLN films consist of amorphous networks of carbon and silicon, which are made by incorporating the Si-O structures into the DLC films. The thermal stability of DLN films was investigated by annealing the films deposited on Si (1 0 0) substrates by plasma enhanced chemical vapor deposition. The films were heated in ambient air for 1 h at the annealing temperatures ranging from 200 to 600 °C. The mechanical properties as well as structural modification of the annealed films were investigated as a function of annealing temperature. The chemical structure, composition, thickness and hardness values of the annealed films were measured by Raman spectrometer, electron probe micro analyzer, scanning electron microscope and ultra micro-indentation system, respectively. The comparison between DLN and DLC films on their thermal stability was made in order to understand the characteristics of DLN films. It is assumed that the DLN films show a good thermal stability for the protective coating applications at high temperature environment in air atmosphere in comparison with DLC films.

ジャーナルThin Solid Films
出版ステータスPublished - 2003 6月 23

ASJC Scopus subject areas

  • 電子材料、光学材料、および磁性材料
  • 表面および界面
  • 表面、皮膜および薄膜
  • 金属および合金
  • 材料化学


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