Thermoelectric gas sensors of different catalyst oxides and heater metals

W. Shin, M. Nishibori, N. Izu, T. Itoh, I. Matsubara, N. Watanabe, T. Kasuga

研究成果: Conference article査読

1 被引用数 (Scopus)


Thermoelectric hydrogen sensors with different catalyst oxides, Pt-Al 2O3 and Pt-CeO2 have been prepared, and their gas sensing properties are investigated in the air and N2 flow. In air, the relationship between the sensor output and the gas concentration is a linear indicating the combustion only depends on the gas concentration in air. In N2 atmosphere, where the oxygen gas content of N2 source cylinder is below the industrial standard of 50 ppm, the sensor output shows also a linear relationship with the gas concentration, but depressed signal level. The microheater of the thermoelectric sensor has been prepared by the co-sputtering of tungsten and platinum to enhance the high temperature stability. The temperature coefficients of the Pt-W alloy multilayer heater were lowered to a half of the level of Pt.

ジャーナルIOP Conference Series: Materials Science and Engineering
出版ステータスPublished - 2011
イベント3rd International Congress on Ceramics, ICC3 - Osaka, Japan
継続期間: 2010 11月 142010 11月 18

ASJC Scopus subject areas

  • 材料科学(全般)
  • 工学(全般)


「Thermoelectric gas sensors of different catalyst oxides and heater metals」の研究トピックを掘り下げます。これらがまとまってユニークなフィンガープリントを構成します。