Thin-film RF noise suppressor integrated onto a transmission line

Masahiro Yamaguchi, Takashi Kuribara, Ken Ichi Arai

研究成果: Conference contribution


We discuss the possibility of the integrated countermeasure of radio-frequency (RF) electromagnetic (EM) noise emission on a RF integrated transmission line by using the loss generation of ferromagnetic thin-films. The targeting frequency range is 1-10 GHz, where most of the bulk and the composite ferrite materials have only a small loss generation. A 3μm thick rf-sputter deposited Cu film was used form a thin coplanar transmission line on a soda glass substrate with a characteristic impedance of 50Ω. The co-planar line is most common in RF integrated circuits. An integrated magnetic thin-film countermeasure element was put on the transmission line with a 7μm thick polyimide layer in between. The magnetic film suppresses the high frequency noise by means of ferromagnetic resonance (FMR) losses. The 0.1μm thick Co85Nb12Zr7 amorphous film was applied in narrow slit trains along the easy axis of magnetization in order to shift the FMR frequency toward the higher frequency range. The transmission characteristics were evaluated by the S21 parameter.

ホスト出版物のタイトルINTERMAG Europe 2002 - IEEE International Magnetics Conference
出版社Institute of Electrical and Electronics Engineers Inc.
ISBN(電子版)0780373650, 9780780373655
出版ステータスPublished - 2002
イベント2002 IEEE International Magnetics Conference, INTERMAG Europe 2002 - Amsterdam, Netherlands
継続期間: 2002 4月 282002 5月 2


Other2002 IEEE International Magnetics Conference, INTERMAG Europe 2002

ASJC Scopus subject areas

  • 電子材料、光学材料、および磁性材料
  • 電子工学および電気工学
  • 表面、皮膜および薄膜


「Thin-film RF noise suppressor integrated onto a transmission line」の研究トピックを掘り下げます。これらがまとまってユニークなフィンガープリントを構成します。