Trident-type tuning fork silicon gyroscope by the phase difference detection

Munemitsu Abe; Eiji Shinohara; Kazuo Hasegawa; Shinji Murata; Masayoshi Esashi

Trident-type tuning fork silicon gyroscope by the phase difference detection

Munemitsu Abe, Eiji Shinohara, Kazuo Hasegawa, Shinji Murata, Masayoshi Esashi

研究成果: Paper › 査読

抄録

The trident-type tuning fork silicon gyroscope was designed and fabricated. The trident-type tuning fork structure and vacuum packaging has higher Q value than 15000. A new detection principle which is based on the phase difference detection is proposed and is confirmed using the fabricated gyroscope. By this detecting method, it is possible to detect the angular rate without control of the driving amplitude. Gyroscope sensitivity obtained was 180 μV/deg/sec.

本文言語	English
ページ	508-513
ページ数	6
出版ステータス	Published - 2000
外部発表	はい
イベント	13th Annual International Conference on Micro Electro Mechanical Systems (MEMS 2000) - Miyazaki, Jpn 継続期間: 2000 1月 23 → 2000 1月 27

Other

Other	13th Annual International Conference on Micro Electro Mechanical Systems (MEMS 2000)
City	Miyazaki, Jpn
Period	00/1/23 → 00/1/27

ASJC Scopus subject areas

制御およびシステム工学
機械工学
電子工学および電気工学

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引用スタイル

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title = "Trident-type tuning fork silicon gyroscope by the phase difference detection",

abstract = "The trident-type tuning fork silicon gyroscope was designed and fabricated. The trident-type tuning fork structure and vacuum packaging has higher Q value than 15000. A new detection principle which is based on the phase difference detection is proposed and is confirmed using the fabricated gyroscope. By this detecting method, it is possible to detect the angular rate without control of the driving amplitude. Gyroscope sensitivity obtained was 180 μV/deg/sec.",

author = "Munemitsu Abe and Eiji Shinohara and Kazuo Hasegawa and Shinji Murata and Masayoshi Esashi",

year = "2000",

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AU - Abe, Munemitsu

AU - Shinohara, Eiji

AU - Hasegawa, Kazuo

AU - Murata, Shinji

AU - Esashi, Masayoshi

PY - 2000

Y1 - 2000

N2 - The trident-type tuning fork silicon gyroscope was designed and fabricated. The trident-type tuning fork structure and vacuum packaging has higher Q value than 15000. A new detection principle which is based on the phase difference detection is proposed and is confirmed using the fabricated gyroscope. By this detecting method, it is possible to detect the angular rate without control of the driving amplitude. Gyroscope sensitivity obtained was 180 μV/deg/sec.

AB - The trident-type tuning fork silicon gyroscope was designed and fabricated. The trident-type tuning fork structure and vacuum packaging has higher Q value than 15000. A new detection principle which is based on the phase difference detection is proposed and is confirmed using the fabricated gyroscope. By this detecting method, it is possible to detect the angular rate without control of the driving amplitude. Gyroscope sensitivity obtained was 180 μV/deg/sec.

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M3 - Paper

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T2 - 13th Annual International Conference on Micro Electro Mechanical Systems (MEMS 2000)

Y2 - 23 January 2000 through 27 January 2000

ER -

Trident-type tuning fork silicon gyroscope by the phase difference detection

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ASJC Scopus subject areas

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