The trident-type tuning fork silicon gyroscope was designed and fabricated. The trident-type tuning fork structure and vacuum packaging has higher Q value than 15000. A new detection principle which is based on the phase difference detection is proposed and is confirmed using the fabricated gyroscope. By this detecting method, it is possible to detect the angular rate without control of the driving amplitude. Gyroscope sensitivity obtained was 180 μV/deg/sec.
|出版ステータス||Published - 2000|
|イベント||13th Annual International Conference on Micro Electro Mechanical Systems (MEMS 2000) - Miyazaki, Jpn|
継続期間: 2000 1月 23 → 2000 1月 27
|Other||13th Annual International Conference on Micro Electro Mechanical Systems (MEMS 2000)|
|Period||00/1/23 → 00/1/27|
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