Weak metastability of Al xGa1- x N ( x = 13/24, 15/24, 17/24) shown by analyzing AlGaN grown on AlN with dense macrosteps

Akira Hirano; Yosuke Nagasawa; Masamichi Ippommatsu; Hideki Sako; Ai Hashimoto; Ryuichi Sugie; Yoshio Honda; Hiroshi Amano; Kazunobu Kojima; Shigefusa F. Chichibu

doi:10.35848/1882-0786/ac79a1

Weak metastability of Al _xGa_{1- x}N ( x = 13/24, 15/24, 17/24) shown by analyzing AlGaN grown on AlN with dense macrosteps

Akira Hirano, Yosuke Nagasawa, Masamichi Ippommatsu, Hideki Sako, Ai Hashimoto, Ryuichi Sugie, Yoshio Honda, Hiroshi Amano, Kazunobu Kojima, Shigefusa F. Chichibu

多元物質科学研究所・計測研究部門

研究成果: Article › 査読

1 被引用数 (Scopus)

抄録

Energy-dispersive X-ray signals calibrated by Rutherford backscattering indicated the generation of Al13/24Ga11/24N in Ga-rich stripes in a nonflat Al0.58Ga0.42N layer. Also, the CL peak wavelengths of ∼259 and 272 nm also showed the generation of Al15/24Ga9/24N and Al13/24Ga11/24N in Al-rich zones and Ga-rich stripes, respectively. The wavelength of a strong CL peak at ∼246 nm, which was observed from the Al0.7Ga0.3N layer in our previous study, is also considered to correspond to the near-band-emission wavelengths of Al17/24Ga7/24N. In particular, the stronger reproducibility of metastable Al15/24Ga9/24N generation was confirmed, in agreement with the computed predictions by other research groups.

本文言語	English
論文番号	075505
ジャーナル	Applied Physics Express
巻	15
号	7
DOI	https://doi.org/10.35848/1882-0786/ac79a1
出版ステータス	Published - 2022 7月

ASJC Scopus subject areas

工学（全般）
物理学および天文学（全般）

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10.35848/1882-0786/ac79a1

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引用スタイル

@article{3f527f5e1e6f4f629f6609cc4d8dee2e,

title = "Weak metastability of Al xGa1- x N ( x = 13/24, 15/24, 17/24) shown by analyzing AlGaN grown on AlN with dense macrosteps",

abstract = "Energy-dispersive X-ray signals calibrated by Rutherford backscattering indicated the generation of Al13/24Ga11/24N in Ga-rich stripes in a nonflat Al0.58Ga0.42N layer. Also, the CL peak wavelengths of ∼259 and 272 nm also showed the generation of Al15/24Ga9/24N and Al13/24Ga11/24N in Al-rich zones and Ga-rich stripes, respectively. The wavelength of a strong CL peak at ∼246 nm, which was observed from the Al0.7Ga0.3N layer in our previous study, is also considered to correspond to the near-band-emission wavelengths of Al17/24Ga7/24N. In particular, the stronger reproducibility of metastable Al15/24Ga9/24N generation was confirmed, in agreement with the computed predictions by other research groups.",

keywords = "AlGaN, EDX, cathodoluminescence, metastability, ordering",

author = "Akira Hirano and Yosuke Nagasawa and Masamichi Ippommatsu and Hideki Sako and Ai Hashimoto and Ryuichi Sugie and Yoshio Honda and Hiroshi Amano and Kazunobu Kojima and Chichibu, {Shigefusa F.}",

note = "Publisher Copyright: {\textcopyright} 2022 The Japan Society of Applied Physics.",

year = "2022",

month = jul,

doi = "10.35848/1882-0786/ac79a1",

language = "English",

volume = "15",

journal = "Applied Physics Express",

issn = "1882-0778",

publisher = "Japan Society of Applied Physics",

number = "7",

}

TY - JOUR

T1 - Weak metastability of Al xGa1- x N ( x = 13/24, 15/24, 17/24) shown by analyzing AlGaN grown on AlN with dense macrosteps

AU - Hirano, Akira

AU - Nagasawa, Yosuke

AU - Ippommatsu, Masamichi

AU - Sako, Hideki

AU - Hashimoto, Ai

AU - Sugie, Ryuichi

AU - Honda, Yoshio

AU - Amano, Hiroshi

AU - Kojima, Kazunobu

AU - Chichibu, Shigefusa F.

PY - 2022/7

Y1 - 2022/7

N2 - Energy-dispersive X-ray signals calibrated by Rutherford backscattering indicated the generation of Al13/24Ga11/24N in Ga-rich stripes in a nonflat Al0.58Ga0.42N layer. Also, the CL peak wavelengths of ∼259 and 272 nm also showed the generation of Al15/24Ga9/24N and Al13/24Ga11/24N in Al-rich zones and Ga-rich stripes, respectively. The wavelength of a strong CL peak at ∼246 nm, which was observed from the Al0.7Ga0.3N layer in our previous study, is also considered to correspond to the near-band-emission wavelengths of Al17/24Ga7/24N. In particular, the stronger reproducibility of metastable Al15/24Ga9/24N generation was confirmed, in agreement with the computed predictions by other research groups.

AB - Energy-dispersive X-ray signals calibrated by Rutherford backscattering indicated the generation of Al13/24Ga11/24N in Ga-rich stripes in a nonflat Al0.58Ga0.42N layer. Also, the CL peak wavelengths of ∼259 and 272 nm also showed the generation of Al15/24Ga9/24N and Al13/24Ga11/24N in Al-rich zones and Ga-rich stripes, respectively. The wavelength of a strong CL peak at ∼246 nm, which was observed from the Al0.7Ga0.3N layer in our previous study, is also considered to correspond to the near-band-emission wavelengths of Al17/24Ga7/24N. In particular, the stronger reproducibility of metastable Al15/24Ga9/24N generation was confirmed, in agreement with the computed predictions by other research groups.

KW - AlGaN

KW - EDX

KW - cathodoluminescence

KW - metastability

KW - ordering

UR - http://www.scopus.com/inward/record.url?scp=85133581360&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=85133581360&partnerID=8YFLogxK

U2 - 10.35848/1882-0786/ac79a1

DO - 10.35848/1882-0786/ac79a1

M3 - Article

AN - SCOPUS:85133581360

SN - 1882-0778

VL - 15

JO - Applied Physics Express

JF - Applied Physics Express

IS - 7

M1 - 075505

ER -